OPTICAL MEASURING INSTRUMENTS
CONTENTS INTRODUCTION PROPAGATION OF LIGHT AND OTHER ELECTROMAGNETIC WAVES PROPERTIES OF ELECTROMAGNETIC WAVES HUYGENS–FRESNEL PRINCIPLE INTERFERENCE OF ELECTROMAGNETIC WAVES RE?ECTION AND REFRACTION DIFFRACTION TRANSMISSION GRATINGS LAMELLAR TRANSMISSION GRATINGS HOLOGRAPHIC TRANSMISSION GRATINGS RE?ECTION GRATINGS LAMELLAR RE?ECTION GRATINGS BLAZED GRATINGS HOLOGRAPHIC GRATINGS SCATTERING DIELECTRIC FUNCTION AND REFRACTIVE INDEX MODELS FOR THE DIELECTRIC FUNCTION KRAMERS–KRONIG ANALYSIS OF DIELECTRIC FUNCTIONS EMPIRIC FORMULAS FOR THE REFRACTIVE INDEX EMA MODELS SPECTRAL REFLECTANCE AND TRANSMITTANCE OF A LAYER STACK RE?ECTANCE AND TRANSMITTANCE OF A SINGLE LAYER COHERENT SUPERPOSITION OF RE?ECTED LIGHT IN?UENCE OF ABSORPTION ON THE LAYER PARTIAL INCOHERENCE DUE TO THICK SUBSTRATES PARTIAL INCOHERENCE DUE TO ROUGHNESS COHERENT SUPERPOSITION OF TRANSMITTED LIGHT PROPAGATING WAVE MODEL FOR A LAYER STACK COHERENT RE?ECTANCE AND TRANSMITTANCE OF A LAYER STACK CONSIDERATION OF INCOHERENT SUBSTRATES CONSIDERATION OF SURFACE ROUGHNESS R-T-F MODEL FOR A LAYER STACK THE OPTICAL MEASUREMENT SPECTRAL RE?ECTANCE AND TRANSMITTANCE MEASUREMENT ELLIPSOMETRIC MEASUREMENT OTHER OPTICAL METHODS PRISM COUPLING CHROMATIC THICKNESS DETERMINATION COMPONENTS FOR THE OPTICAL MEASUREMENT LIGHT SOURCES HALOGEN LAMPS WHITE LIGHT LED SUPERLUMINESCENCE DIODES XENON HIGH-PRESSURE ARC LAMPS DEUTERIUM LAMPS OPTICAL COMPONENTS LENSES AND MIRRORS POLARIZERS AND ANALYZERS OPTICAL RETARDERS OPTICAL FIBERS MINIATURIZED SPECTROMETERS GRATINGS DETECTORS SYSTEM PROPERTIES THIN-FILM THICKNESS DETERMINATION FAST FOURIER TRANSFORM SINGLE LAYER LAYER STACK ACCURACY, RESOLUTION, REPEATABILITY, AND REPRODUCIBILITY REGRESSION ANALYSIS WITH 2-TEST METHOD OF THICKNESS DETERMINATION THE COLOR OF THIN FILMS APPLICATIONS HIGH-RE?ECTION AND ANTIRE?ECTION COATINGS HR COATINGS ON METALLIC MIRRORS AR COATINGS ON GLASS AR COATINGS ON SOLAR WAFERS THIN SINGLE- AND DOUBLE-LAYER COATINGS SIO2 ON SILICON WAFERS SI3N4 HARDCOAT DOUBLE-LAYER SYSTEM POROUS SILICON ON SILICON PHOTORESISTS AND PHOTOLITHOGRAPHIC STRUCTURING THICKNESS OF WAFERS AND TRANSPARENT PLASTIC FILMS THICKNESS OF SEMICONDUCTOR, GLASS, AND SAPPHIRE WAFERS THICKNESS OF TRANSPARENT PLASTIC FILMS THICKNESS OF DOPED SILICON SILICON ON INSULATOR THIN-FILM PHOTOVOLTAICS INORGANIC THIN-FILM SOLAR CELLS ORGANIC THIN-FILM SOLAR CELLS MEASUREMENT OF CRITICAL DIMENSIONS