ION IMPLANTATION AND BEAM PROCESSING

By I. DAARO

Chapter 1 Selection of Impurities 1 Chapter 2 Physics of Ion Implantation 6 Chapter 3 Monte Carlo Simulation 90 Chapter 5 Pearson Function Family 166 Chapter 6 The Other Analytical Model for Ion Implantation Profiles: Edgeworth Polynomial 221 Chapter 7 Parameter Extraction for Analytical Ion Implantation Profile Model 239 Chapter 8 Lateral Distribution 264 Chapter 9 LSS Theory 300 Chapter 10 Quasi Crystal LSS Theory 374 Chapter 11 Simplified LSS Theory 397