PHYSICS OF RADIO-FREQUENCY PLASMAS

By PATRICIA JOHNSON

CONTENTS INTRODUCTION PLASMAS PLASMA PROCESSING FOR MICROELECTRONICS PLASMA PROPULSION RADIO-FREQUENCY PLASMAS: E, H AND W-MODES WHAT LIES AHEAD PLASMA DYNAMICS AND EQUILIBRIUM THE MICROSCOPIC PERSPECTIVE THE MACROSCOPIC PERSPECTIVE GLOBAL PARTICLE AND ENERGY BALANCE THE ELECTRODYNAMIC PERSPECTIVE REVIEW OF CHAPTER BOUNDED PLASMA THE SPACE CHARGE SHEATH REGION THE PLASMA/SHEATH TRANSITION THE PLASMA REGION: TRANSPORT MODELS RADIO-FREQUENCY SHEATHS RESPONSE TIMES ION DYNAMICS ELECTRON DYNAMICS ANALYTICAL MODELS OF (HIGH-FREQUENCY) RF SHEATHS SUMMARY OF IMPORTANT RESULTS SINGLE-FREQUENCY CAPACITIVELY COUPLED PLASMAS A CONSTANT ION DENSITY, CURRENT-DRIVEN SYMMETRICAL MODEL A NON-UNIFORM ION DENSITY, CURRENT-DRIVEN MODEL GLOBAL MODEL OTHER REGIMES AND CON?GURATIONS MULTI-FREQUENCY CAPACITIVELY COUPLED PLASMAS DUAL-FREQUENCY CCP IN THE ELECTROSTATIC APPROXIMATION ELECTROMAGNETIC REGIME AT HIGH FREQUENCY INDUCTIVELY COUPLED PLASMAS ELECTROMAGNETIC MODEL IMPEDANCE OF THE PLASMA ALONE THE TRANSFORMER MODEL POWER TRANSFER EF?CIENCY IN PURE INDUCTIVE DISCHARGES CAPACITIVE COUPLING FURTHER CONSIDERATIONS HELICON PLASMAS PARALLEL PROPAGATION IN AN IN?NITE PLASMA HELICON WAVE PROPAGATION IN A CYLINDER CONDITIONS FOR EXISTENCE OF THE HELICON MODES WAVE POWER ABSORPTION: HEATING E–H–W TRANSITIONS REAL PLASMAS HIGH-DENSITY PLASMAS MAGNETIZED PLASMAS ELECTRONEGATIVE PLASMAS EXPANDING PLASMAS ELECTRICAL MEASUREMENTS ELECTROSTATIC PROBES ELECTROSTATIC PROBES FOR RF PLASMAS A RETARDING ?ELD ANALYSER (RFA) PROBING WITH RESONANCES AND WAVES