IMPURITY DOPING PROCESSES IN SILICON

By I. LAENR

Contents Chapter 1 Semiconductor Material Science 1 Chapter 2 Doping Techniques 43 Chapter 3 Process Engineering 86 Chapter 4 Advanced Device Integration 125

ISBN978-93-7758-484-9
Copyright Year2027
Pages150
Price$275.99
LanguageEnglish
FormatPDF