RF MEMS CIRCUIT DESIGN FOR WIRELESS COMMUNICATIONS

By CHARLOTTE CLARK

CONTENTS WIRELESS SYSTEMS—A CIRCUITS PERSPECTIVE INTRODUCTION SPHERES OF WIRELESS ACTIVITY—TECHNICAL ISSUES THE HOME AND THE OFFICE THE GROUND FIXED/MOBILE PLATFORM THE SPACE PLATFORM WIRELESS STANDARDS, SYSTEMS, AND ARCHITECTURES WIRELESS STANDARDS CONCEPTUAL WIRELESS SYSTEMS WIRELESS TRANSCEIVER ARCHITECTURES POWER- AND BANDWIDTH-EFFICIENT WIRELESS SYSTEMS— CHALLENGES MEMS-BASED WIRELESS APPLIANCES ENABLE UBIQUITOUS CONNECTIVITY SUMMARY REFERENCES ELEMENTS OF RF CIRCUIT DESIGN PHYSICAL ASPECTS OF RF CIRCUIT DESIGN SKIN EFFECT TRANSMISSION LINES ON THIN SUBSTRATES SELF-RESONANCE FREQUENCY QUALITY FACTOR MODING (PACKAGING) PRACTICAL ASPECTS OF RF CIRCUIT DESIGN DC BIASING IMPEDANCE MISMATCH EFFECTS IN RF MEMS PROBLEMS RF MEMS–ENABLED CIRCUIT ELEMENTS AND MODELS RF/MICROWAVE SUBSTRATE PROPERTIES MICROMACHINED-ENHANCED ELEMENTS CAPACITORS INDUCTORS VARACTORS MEM SWITCHES SHUNT MEM SWITCH LOW-VOLTAGE HINGED MEM SWITCH APPROACHES PUSH-PULL SERIES SWITCH FOLDED-BEAM-SPRINGS SUSPENSION SERIES SWITCH RESONATORS TRANSMISSION LINE PLANAR RESONATORS CAVITY RESONATORS MICROMECHANICAL RESONATORS FILM BULK ACOUSTIC WAVE RESONATORS MEMS MODELING MEMS MECHANICAL MODELING MEMS ELECTROMAGNETIC MODELING NOVEL RF MEMS–ENABLED CIRCUITS RECONFIGURABLE CIRCUIT ELEMENTS THE RESONANT MEMS SWITCH TUNABLE CPW RESONATOR MEMS MICROSWITCH ARRAYS RECONFIGURABLE CIRCUITS DOUBLE-STUB TUNER NTH-STUB TUNER FILTERS RESONATOR TUNING SYSTEM MASSIVELY PARALLEL SWITCHABLE RF FRONT ENDS TRUE TIME-DELAY DIGITAL PHASE SHIFTERS RECONFIGURABLE ANTENNAS TUNABLE DIPOLE ANTENNAS TUNABLE MICROSTRIP PATCH-ARRAY ANTENNAS RF MEMS–BASED CIRCUIT DESIGN—CASE STUDIES PHASE SHIFTERS PHASE SHIFTER FUNDAMENTALS X-BAND RF MEMS PHASE SHIFTER FOR PHASED ARRAY APPLICATIONS—CASE STUDY KA-BAND RF MEMS PHASE SHIFTER FOR PHASED ARRAY APPLICATIONS—CASE STUDY KA-BAND RF MEMS PHASE SHIFTER FOR RADAR SYSTEMS APPLICATIONS—CASE STUDY FILM BULK ACOUSTIC WAVE FILTERS FBAR FILTER FUNDAMENTALS FBAR FILTER FOR PCS APPLICATIONS—CASE STUDY RF MEMS FILTERS A KA-BAND MILLIMETER-WAVE MICROMACHINED TUNABLE FILTER—CASE STUDY A HIGH-Q 8-MHZ MEM RESONATOR FILTER—CASE STUDY RF MEMS OSCILLATORS RF MEMS OSCILLATOR FUNDAMENTALS A 14-MHZ MEM OSCILLATOR—CASE STUDY A KA-BAND MICROMACHINED CAVITY OSCILLATOR—CASE STUDY A 2 4-GHZ MEMS-BASED VOLTAGE-CONTROLLED OSCILLATOR—CASE STUDY