ELECTRONICS OF MICROWAVE TUBES
CHAPTER 1 THE SEMICONDUCTOR INDUSTRY CHAPTER 2 PROPERTIES OF SEMICONDUCTOR MATERIALS AND CHEMICALS CHAPTER 3 CRYSTAL GROWTH AND SILICON WAFER PREPARATION CHAPTER 4 OVERVIEW OF WAFER FABRICATION CHAPTER 5 CONTAMINATION CONTROL CHAPTER 6 PRODUCTIVITY AND PROCESS YIELDS CHAPTER 7 OXIDATION CHAPTER 8 THE TEN-STEP PATTERNING PROCESS—SURFACE PREPARATION TO EXPOSURE CHAPTER 9 THE TEN-STEP PATTERNING PROCESS—DEVELOPING TO FINAL INSPECTION CHAPTER 10 ADVANCED PHOTOLITHOGRAPHY PROCESSES CHAPTER 11 DOPING CHAPTER 12 LAYER DEPOSITION CHAPTER 13 METALLIZATION CHAPTER 14 PROCESS AND DEVICE EVALUATION CHAPTER 15 THE BUSINESS OF WAFER FABRICATION CHAPTER 16 INTRODUCTION TO DEVICES AND INTEGRATED CIRCUIT FORMATION CHAPTER 17 INTRODUCTION TO INTEGRATED CIRCUITS CHAPTER 18 PACKAGING