VLSI ELECTRONICS MICROSTRUCTURE SCIENCE

By JOSEPH MILLER

CONTENTS PLASMA AND ITS CLASSI?CATION APPLICATION OF LOW-TEMPERATURE PLASMA ACADEMIC FUSION REFERENCES PHENOMENOLOGICAL DESCRIPTION OF THE CHARGED PARTICLE TRANSPORT TRANSPORT IN REAL (CON?GURATION) SPACE MOMENTUM BALANCE OF ELECTRONS ENERGY BALANCE OF ELECTRONS TRANSPORT IN VELOCITY SPACE THERMAL EQUILIBRIUM AND ITS GOVERNING RELATIONS BOLTZMANN DISTRIBUTION IN REAL SPACE MACROSCOPIC PLASMA CHARACTERISTICS INTRODUCTION SPATIAL SCALE OF CHARGE-SEPARATION TIME SCALE FOR CHARGE-SEPARATION PLASMA SHIELDING DEBYE SHIELDING PARTICLE DIFFUSION BOHM VELOCITY FLOATING POTENTIAL PARTICLE REPRESENTATION IN CLASSICAL AND QUANTUM MECHANICS LOCALLY ISOLATED PARTICLE GROUP AND WAVE PACKETS COLLISIONS AND CROSS SECTIONS CONSERVATION LAWS IN COLLISIONS CONDITIONS FOR THE APPLICABILITY OF THE CLASSICAL SCATTERING THEORY QUANTUM THEORY OF SCATTERING MODI?ED EFFECTIVE RANGE THEORY IN ELECTRON SCATTERING COLLISIONS BETWEEN ELECTRONS AND NEUTRAL ATOMS/MOLECULES RESONANT SCATTERING ELECTRON–ATOM COLLISIONS ELECTRON–ATOM SCATTERING CROSS SECTIONS ELECTRON–MOLECULE COLLISIONS ROTATIONAL, VIBRATIONAL, AND ELECTRONIC ENERGY LEVELS OF MOLECULES ROTATIONAL ENERGY LEVELS ROTATIONAL EXCITATION CROSS SECTIONS VIBRATIONAL EXCITATION VIBRATIONAL ENERGY LEVELS VIBRATIONAL CROSS SECTIONS ELECTRONIC EXCITATION AND DISSOCIATION CROSS SECTIONS FOR ELECTRONIC EXCITATION OF MOLECULES ELECTRON COLLISIONS WITH EXCITED ATOMS AND MOLECULES NONCONSERVATIVE COLLISIONS OF ELECTRONS WITH ATOMS AND MOLECULES ELECTRON ATTACHMENT DISSOCIATIVE ELECTRON ATTACHMENT ION PAIR FORMATION ELECTRON ATTACHMENT TO EXCITED MOLECULES RATE COEF?CIENTS FOR ATTACHMENT ELECTRON–ION AND ION–ION RECOMBINATION HEAVY PARTICLE COLLISIONS ION–MOLECULE COLLISIONS CHARGE TRANSFER, ELASTIC, AND INELASTIC SCATTERING OF IONS ION–MOLECULE REACTIONS COLLISIONS OF FAST NEUTRALS COLLISIONS OF EXCITED PARTICLES CHEMI-IONIZATION AND PENNING IONIZATION COLLISIONS OF SLOW NEUTRALS AND RATE COEF?CIENTS QUENCHING AND TRANSPORT OF EXCITED STATES KINETICS OF ROTATIONAL AND VIBRATIONAL LEVELS PHOTONS IN IONIZED GASES EMISSION AND ABSORPTION OF LINE RADIATION RESONANT RADIATION TRAPPING ELEMENTARY PROCESSES AT SURFACES PHOTO-EMISSION THERMIONIC EMISSION FIELD-INDUCED EMISSION EMISSION OF IONS AND NEUTRALS FROM SURFACES SURFACE NEUTRALIZATION ADSORPTION THE BOLTZMANN EQUATION AND TRANSPORT EQUATIONS OF CHARGED PARTICLES THE BOLTZMANN EQUATION TRANSPORT COEF?CIENTS CONSERVATION OF NUMBER DENSITY CONSERVATION OF MOMENTUM COLLISION TERM IN THE BOLTZMANN EQUATION COLLISION INTEGRAL COLLISION INTEGRAL BETWEEN AN ELECTRON AND A GAS MOLECULE ELASTIC COLLISION TERM JELAS EXCITATION COLLISION TERM JEX ELECTRON ATTACHMENT COLLISION TERM JATT SPHERICAL HARMONICS AND THEIR PROPERTIES VELOCITY DISTRIBUTION OF ELECTRONS VELOCITY DISTRIBUTION UNDER UNIFORM NUMBER DENSITY: G0 ELECTRON TRANSPORT PARAMETERS ELECTRON DRIFT VELOCITY DIFFUSION COEF?CIENTS MEAN ENERGY OF ELECTRONS ELECTRON TRANSPORT IN RADIO-FREQUENCY ELECTRIC FIELDS RELAXATION TIME CONSTANTS EFFECTIVE FIELD APPROXIMATION EXPANSION PROCEDURE DIRECT NUMERICAL PROCEDURE TIME-VARYING SWARM PARAMETERS CONTINUUM MODELS LOCAL FIELD APPROXIMATION (LFA) QUASI-THERMAL EQUILIBRIUM (QTE) MODEL RELAXATION CONTINUUM (RCT) MODEL PARTICLE MODELS MONTE CARLO SIMULATIONS (MCSS) PARTICLE-IN-CELL (PIC) AND PARTICLE-IN-CELL/MONTE CARLO SIMULATION (PIC/MCS) MODELS HYBRID MODELS EQUIVALENT CIRCUIT MODEL IN CCP EQUIVALENT CIRCUIT MODEL IN ICP TRANSMISSION-LINE MODEL (TLM) ELECTROMAGNETIC FIELDS AND MAXWELL’S EQUATIONS FARADAY’S LAW AMPERE’S LAW NUMERICAL PROCEDURE OF MODELING TIME CONSTANT OF THE SYSTEM COLLISION-ORIENTED RELAXATION TIME PLASMA-ORIENTED TIME CONSTANT/DIELECTRIC RELAXATION TIME NUMERICAL TECHNIQUES TO SOLVE THE TIME-DEPENDENT DRIFT-DIFFUSION EQUATION TIME-EVOLUTION METHOD FINITE DIFFERENCE DIGITALIZATION AND STABILIZATION SCHARFETTER–GUMMEL METHOD BOUNDARY CONDITIONS IDEAL BOUNDARY — WITHOUT SURFACE INTERACTIONS NEUMANN CONDITION PERIODICITY CONDITION ELECTRODE SURFACE METALLIC ELECTRODE PLASMA DEPOSITION MOVING BOUNDARY UNDER PROCESSING RADIO-FREQUENCY CAPACITIVE COUPLING MECHANISM OF PLASMA MAINTENANCE LOW-FREQUENCY PLASMA HIGH-FREQUENCY PLASMA ELECTRONEGATIVE PLASMA VERY HIGH-FREQUENCY PLASMA TWO-FREQUENCY PLASMA INDUCTIVELY COUPLED PLASMA E-MODE AND H-MODE EFFECT OF METASTABLES FUNCTION OF ICP WAVE PROPAGATION IN PLASMAS ICP AND THE SKIN DEPTH MAGNETICALLY ENHANCED PLASMA DIRECT-CURRENT MAGNETRON PLASMA MAGNETIC CON?NEMENTS OF PLASMAS MAGNETICALLY RESONANT PLASMAS PLASMA PROCESSING AND RELATED TOPICS SPUTTERED PARTICLE TRANSPORT PLASMA CVD LARGE-AREA DEPOSITION WITH HIGH RATE WAFER BIAS ON ELECTRICALLY ISOLATED WAFERS (WITHOUT RADIO-FREQUENCY BIAS) ON WAFERS WITH RADIO-FREQUENCY BIAS SELECTION OF FEED GAS AL ETCHING SIO2 ETCHING FEATURE PRO?LE EVOLUTION PLASMA BOSCH PROCESS CHARGING DAMAGE SURFACE CONTINUITY AND CONDUCTIVITY